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{1251}
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ref: -0 tags: microflex interconnect polyimide Stieglitz date: 03-03-2015 00:33 gmt revision:1 [0] [head]

IEEE-938305 (pdf) High Density Interconnects and flexible hybrid assemblies for active biomedical implants

  • Idea: make vias in your metallized PI film. Bump-bond through these vias to a chip below.
  • Achieve center-to -center distances of 100um.
  • No longer using this? See {1250}, which uses thermosonic bonding.

{1230}
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ref: -0 tags: dissertation interconnect parylene flexible electrodes date: 02-26-2013 00:30 gmt revision:2 [1] [0] [head]

http://docs.lib.purdue.edu/dissertations/AAI3444877/

  • Several different projects --
    • Stretchable PDMS electrodes
    • PDMS-parylene ECoG
    • Transmitting parallel neural data via free-space optical link
    • semi-flexible hydrogel-parylene neural electrode.
    • The parylene electrodes with selectively patterned hydrogel provide stiff mechanical properties for easy penetration into the brain tissues and subsequent flexibility after insertion upon swelling of the hydrogel.
    • advanced packaging system with using a composite inorganic parylene combination.
      • Atomic layer deposited alumina-zirconia (Al2O3–ZrO2) composite layer can provide a conformal and nano-laminated coating on parylene surface in neural packaging systems in order to improve the hermeticity for long term implantations
  • Can't get the entire PDF. annoying.

{1231}
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ref: -0 tags: parylene interconnect monolithic integration silicon DRIE date: 02-26-2013 00:29 gmt revision:1 [0] [head]

A New Multi-Site Probe Array with Monolithically Integrated Parylene Flexible Cable for Neural Prostheses

    • Use DRIE to etch the back of the wafer after patterning the front. Clever!

{1189}
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ref: -0 tags: microelectrode array flexible PDMS via interconnect Georgia date: 01-04-2013 00:33 gmt revision:0 [head]

IEEE-6197244 (pdf) A PDMS-Based Integrated Stretchable Microelectrode Array (isMEA) for Neural and Muscular Surface Interfacing

  • Targeted at e.g. ECoG; in this paper, they look at cat muscle (epimyscial recording).
  • MEA is directly fabricated with a stretchable substrate, such as a thin PCB or ASIC, through via bonding for built-in packaging.