IEEE-6170092 (pdf) An ultra-compliant, scalable neural probe with molded biodissolvable delivery vehicle
-
- Optical coherence tomography is cool.
- Large footprint - 150 or 300um, 135um thick (13500 or 40500 um^2; c.f. tungsten needle 1963 (50um) or 490 (25um) um^2.)
- Delivery vehicle is fabricated from biodissolvable carboxy-methylcellulose (CMC).
- Device dissolves within three minutes of implantation.
- Yet stiff enough to penetrate the dura of rats (with what degree of dimpling?)
- Lithographic patterning process pretty clever, actually.
- Parylene-X is ~ 1.1 um thick.
- 500nm Pt is patterned via ion milling with a photoresist mask.
- Use thin 20nm Cr etch mask for both DRIE (STS ICP) and parylene etch.
- Probes are tiny -- 10um wide, 2.7um thick, coated in parylene-X.
- CMC polymer tends to bend and warp due to stress -- must be clamped in a special jig.
- No histology. Follow-up: {1399}
|