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ref: -2001 tags: polyimide Kipke bioactive flexible electrode arrays date: 12-22-2017 01:16 gmt revision:2 [1] [0] [head]

PMID-11327505 Flexible polyimide-based intracortical electrode arrays with bioactive capability.

  • Appears to be the first or one of the first use of thin-film polyimide for intracortical recording; will have to cite.
  • Fab protocol: 500nm release thermal oxide, photo-paternable PI, Cr-Au metalization, O2 plasma de-scum for adhesion (ish?), <20um total thickness.
  • Conductive epoxy attachment to connector.