{1306} revision 2 modified: 06-24-2015 22:53 gmt

PMID-18640155 Characterization of flexible ECoG electrode arrays for chronic recording in awake rats.

  • Yeager JD1, Phillips DJ, Rector DM, Bahr DF.
  • We tested several different adhesion techniques including the following: gold alone without an adhesion layer, titanium-tungsten, tantalum and chromium.
  • All films were DC magnetron sputtered, without breaking vacuum between the adhesion layer (5nm) and gold counductor layer (300nm).
  • We found titanium-tungsten to be a suitable adhesion layer considering the biocompatibility requirements as well as stability and delamination resistance.
  • While chromium and tantalum produced stronger gold adhesion, concerns over biocompatibility of these materials require further testing.
    • Thought: use tantalum directly, no Ti needed.
    • Much better than Cr -- much more ductile and biocompatible.
    • Caveat: studies showing reduction to stociometric Ta results in delamination.
  • Ta conductivity: 1.35e-7 Ohms * m; Ti 4.2e-7; 3x better (film can be 3x thinner..)