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ref: Cheung-2007.03 tags: flexible electrode array Michigan probe histology Vancouver current source density EPFL polyimide date: 12-21-2013 21:07 gmt revision:5 [4] [3] [2] [1] [0] [head]

PMID-17027251[0] Flexible polyimide microelectrode array for in vivo recordings and current source density analysis.

  • Polyimide -- PI-2611 precusor.
  • 50nm Ti adhesion, 200nm Pt, both sputtered.
  • Electrodes etched via RIE in Cl2.
    • Sputtered and photo-patterned SiO2 etch mask.
  • Used regular solder to connect to a Samtec.
  • 15um total thickness.
  • 25um electrode diameter.
  • They were inserted directly (no carrier nor guide) into the brain; can be re-used.
  • Tested to 8 weeks.
  • No figure comparing silicon and polyimide, though they claim minimal GFAP response to the electrodes.

____References____

[0] Cheung KC, Renaud P, Tanila H, Djupsund K, Flexible polyimide microelectrode array for in vivo recordings and current source density analysis.Biosens Bioelectron 22:8, 1783-90 (2007 Mar 15)