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ref: Jones-1992.01 tags: Utah MEA original date: 01-05-2012 22:08 gmt revision:2 [1] [0] [head]

PMID-1510294[0] A Glass/silicon Composite Intracortical Electrode Array.

  • Describe fabrication of the Utah probe.
  • Needles 1.5mm long, 80um in diameter at the base, tapered.
  • 10 x 10 array on 400um spacing.
  • Impedance 10T ohm, capacitance 50fF
  • Old array used diamond dicing saw.
    • electrodes were isolated via p-n-p junctions, formed via thermomigration.
    • Too clever! These electrodes leaked & had poor yield.
  • New method: melt glass into shallow saw kerfs on the backside of a p-doped 1.83mm thick wafer, then remove much of the silicon from the top using the same saw. This produces columns of silicon held together at the base by glass.
    • Diamond dicing saw has a kerf of 50um. These things sound awesome.
    • Photopatterned aluminum electrode lands on the back.
    • Points are made by an acid etch.
    • Then plated in metal of some sort
    • Followed by polymide insulation (3-6um thick) (rather round from the SEM).
    • DC resistance of 10 to 20k.


[0] Jones KE, Campbell PK, Normann RA, A glass/silicon composite intracortical electrode array.Ann Biomed Eng 20:4, 423-37 (1992)